Microrobot
Microrobot with impact type multilayer piezo actuator 4.0x4.6x3.6mm
Leg motion of piezo microrobot
Microrobot with artificial muscle wire 4.0x2.7x2.5mm
Leg motion of artificial muscle wire
Ultra small MEMS Device
マイクロエアタービン発電機
MEMS electromagnetic motor with multilayer ceramic circuit